WebOct 2, 2013 · Balzers, Liechtenstein, October 02, 2013 – Oerlikon’s Advanced Technologies Segment, a leading supplier of PVD deposition equipment, has received multiple orders for its CLUSTERLINE® 300 system for use in the manufacture of power devices. CLUSTERLINE® 300 is the first PVD tool worldwide that runs 300mm thin wafer … WebSi <100> substrate in an Evatec Clusterline® 200 II pulsed DC physical vapor deposition (PVD) system. Depositions were performed at the Singh Center for Nanotechnology at the University of Pennsylvania. The depositions utilized the process parameters in Table I that were optimized for obtaining
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Web8 CH - WF/WT CONTROL MONITORS. This controller of values monitors up to 8 channels, specifically 2 for monitors with temperature control and water flow. When one value after … WebClusterline tools are for PVD, soft etch and PECVD processes and can be for 200mm or 300mm. Responsibilities include installation, start up, … maybank share price myr
The Northeastern University SMART Center Deploys an Evatec CLUSTERLINE …
WebCLUSTERLINE® are a family of platforms named according to their substrate size capability. All platforms share cluster architecture with cassette-to-cassette processing and fully automated handling. Production solutions on CLUSTERLINE® cross all 6 Evatec … WebDec 1, 2024 · Above 20 pairs (e.g. NbO2 / SiO2 ) the CLUSTERLINE® RAD with high uniformity deposition of typically < 0.25% and in-situ process control features for optical thickness (GSM) and the plasma ... WebJan 1, 2011 · A comprehensive study on the complete process module for the fabrication of AlN-based MEMS sensors and actuators is presented. The investigations include the influence of the electrode material, AlN thickness and stress tuning during sputtering on the material parameters, especially the piezoelectric coefficients. maybank shares price today